| 摘要 |
A method of manufacturing a stamper for forming an optical disk substrate by applying a photoresist onto a master substrate, exposing the photoresist to light to produce a pattern, and forming a guiding groove by etching using the remaining photoresist after development as a mask, which comprises the steps of forming in advance a plurality of thin film layers of mutually different materials on the master substrate in a multilayer structure and sequentially etching the plurality of thin film layers selectively to produce the guiding groove.
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