发明名称 Process for producing semiconductor wafer with adhesive film
摘要 A process for producing a semiconductor wafer having an adhesive film, by adhering an adhesive film onto a bump-formed surface of a semiconductor wafer having formed thereon bumps with a predetermined arrangement, which comprises: determining a particular arrangement axis direction in which intervals between adjacent linear arrangement axes connecting the bumps becomes the shortest; and adhering the adhesive film in the direction substantially at a right angle with the determined arrangement axis direction, so as to markedly reduce voids included in the adhesion surface upon adhering an adhesive film such as underfill onto a semiconductor wafer.
申请公布号 US6652688(B2) 申请公布日期 2003.11.25
申请号 US20020176530 申请日期 2002.06.24
申请人 NITTO DENKO CORPORATION 发明人 MATSUMURA AKIKO;HOTTA YUJI;MISUMI SADAHITO
分类号 H01L21/60;H01L21/56;(IPC1-7):B32B31/20;B32B7/12;C09J7/02;H01L23/48;H01L21/50 主分类号 H01L21/60
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