发明名称 |
Differential capacitive pressure sensor and fabricating method therefor |
摘要 |
A pressure sensor using two capacitors for measuring a pressure stimulus includes a substrate having a diaphragm positioned at a center portion thereof. The diaphragm has a reduced thickness so that the diaphragm displaces upward and downward in response to a pressure stimulus. A first capacitor is provided on the diaphragm and at least a second capacitor is provided on a bulk portion of the substrate so as to be adjacent to the first capacitor. The first and the second capacitor are connected to each other in series, wherein capacitance differs between the first and the second capacitor when the diaphragm moves up and down in response to the pressure stimulus.
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申请公布号 |
US6651506(B2) |
申请公布日期 |
2003.11.25 |
申请号 |
US20020100826 |
申请日期 |
2002.03.15 |
申请人 |
KOREA ELECTRONICS TECHNOLOGY INSTITUTE |
发明人 |
LEE DAE-SUNG;PARK HYO-DERK;LEE KYOUNG-II;LEE YOO-JIN;CHOI YEON-SHIK |
分类号 |
G01L9/00;(IPC1-7):G01L9/12 |
主分类号 |
G01L9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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