发明名称 Methods and apparatus for determining blur of an optical system
摘要 Methods are disclosed for quantifying blur, of a beam of an optical medium, exhibited by an optical system through which the beam of the optical medium passes. An embodiment of the method includes the step of determining, in an image plane of the optical system, respective destination positions of a number (N) of rays of the optical medium originating according to a probability distribution from respective points in an object plane of the optical system. The destination positions are projected onto an axis in a direction, in the image plane, in which blur is to be quantified. Respective coordinates of each of the destination positions on the axis are determined and the determined coordinates are ranked. Blur is calculated from a profile of the ranked coordinates.
申请公布号 US6654106(B2) 申请公布日期 2003.11.25
申请号 US20020037141 申请日期 2002.01.02
申请人 NIKON CORPORATION 发明人 KAMIJO KOICHI
分类号 G03F7/20;G06T15/06;H01J37/04;H01J37/26;H01L21/027;(IPC1-7):G01J1/00 主分类号 G03F7/20
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