发明名称 Photolithography lens
摘要 A lens design having two concave mirrors or Mangins and a turning mirror is disclosed. The optical axis of the concave elements are approximately coplanar and intersect on a turning mirror, and the normal to the surface of the turning mirror bisects the angle between the two optical axis.
申请公布号 US6654164(B1) 申请公布日期 2003.11.25
申请号 US20020059557 申请日期 2002.01.29
申请人 WILCZYNSKI JANUSZ S. 发明人 WILCZYNSKI JANUSZ S.
分类号 G02B17/08;G03F7/20;(IPC1-7):G02B17/00 主分类号 G02B17/08
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