发明名称 Method of manufacturing member pattern and method of manufacturing wiring, circuit substrate, electron source, and image-forming apparatus
摘要 A method of manufacturing wiring includes a step of forming a conductive layer pattern through a developing step after performing film formation and exposure step using photosensitive paste that contains a photosensitive material and a conductive material, a step of forming an insulating layer pattern through a developing step after performing film formation and exposure step using photosensitive paste that contains a photosensitive material and an insulating material, and a baking step for baking the conductive layer pattern and the insulating layer pattern. Thus, a wiring pattern can be formed with high precision by reducing an edge curl.
申请公布号 US6653232(B2) 申请公布日期 2003.11.25
申请号 US20020207864 申请日期 2002.07.31
申请人 CANON KABUSHIKI KAISHA 发明人 UDA YOSHIMI;ISHIWATA KAZUYA
分类号 H01J1/304;H01J9/02;H05K1/09;H05K3/02;(IPC1-7):H01L21/44 主分类号 H01J1/304
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