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发明名称
摘要
申请公布号
JP3469664(B2)
申请公布日期
2003.11.25
申请号
JP19940310813
申请日期
1994.12.14
申请人
发明人
分类号
H01L29/73;H01L21/331;H01L29/06;H01L29/732;H01L29/739;H01L29/78;(IPC1-7):H01L29/78
主分类号
H01L29/73
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代理人
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地址
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