| 摘要 |
PURPOSE: To provide a good air current distribution by forming an air filter for a clean room into a shape whose cross section is almost a semiellipse cut in its minor axis direction. CONSTITUTION: In an air filter unit 50 for a clean room, an air filter 51 is formed into a shape whose cross section is almost a semiellipse cut in its minor axis direction. The air filter unit 50 constituted of the air filter 51 and a supplier chamber 52 is fitted on a ceiling 61 of a clean room 60. At this time, the curvature of a filter surface 51a in a region 51A for blowing out in the minor axis direction of the air filter 51 is made smaller than that of a conventional air filter. That is, by increasing minus Z components in the vector direction of fluid elements 70 arranged in the minus Z direction from a semicircular section little by little, the fluid elements 70 being in charge of an expanse of a space in the X direction is increased. In this way, the expanse of the fluid elements 70 to a space in the X direction is decreased, wind velocity is kept rather far from a blow-out hole to restrain the generation of negative pressure. |
