发明名称 |
Scrubbing assembly for wafer-cleaning device |
摘要 |
A scrubbing assembly for a wafer-cleaning device is provided. The wafer-cleaning device is provided with a base. The scrubbing assembly comprises a scrubber, a cup and an oscillator. The scrubber is disposed on the base in a manner such that it can move between a first position and a second position. The scrubber scrubs a wafer when it locates in the first position. The cup, for receiving DI water, is disposed on the base. The scrubber locates inside the cup and contacts the DI water when it locates in the second position. The oscillator is disposed at the cup, and it vibrates the DI water when the scrubber locates inside the cup and is contact with the DI water.
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申请公布号 |
US6651284(B2) |
申请公布日期 |
2003.11.25 |
申请号 |
US20010973706 |
申请日期 |
2001.10.11 |
申请人 |
SILICON INTEGRATED SYSTEMS CORP. |
发明人 |
TSENG KAO-MAO;TSENG SU-LING;CHANG HSIN YI |
分类号 |
B08B1/00;B08B3/10;H01L21/00;(IPC1-7):B08B1/04;B08B3/02;B08B3/12 |
主分类号 |
B08B1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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