| 摘要 |
PURPOSE: An electrostatic force tuning fork micro gyroscope is provided to prevent a voltage signal of an exciting plate for driving force of a proof mass from acting as noise of an acceleration sensing signal. CONSTITUTION: An electrostatic force tuning fork micro gyroscope is composed of a plurality of proof mass plates(11a,11b) separated from each other at predetermined intervals; sensing electrodes(12a,12b) arranged right under the proof mass plates to form a capacitor varying the charging amount to the distance separated from the proof mass plate; plate members(11a',11b',11a",11b") extended in the opposite directions at both sides of the proof mass plate and formed with comb teeth-shape structures at the sides; exciting plates(15a,15b,15c) for including the comb teeth-shape structure engaged with the comb teeth-shape of the plate member and supplying attraction for exciting the proof mass plates; supporting beams(13) for supporting the plate members, respectively; and an anchor(14) for propping up the supporting beams, respectively.
|
