| 摘要 |
PROBLEM TO BE SOLVED: To develop a phase unit which can be easily set, when various type substrate is treated so as to automatically treat to a considerable degree, even for a small lot. SOLUTION: In an apparatus (4) for transferring the substrate (2) in an oven (3), the oven (3) has a passage (9) formed of a floor (10) and two side faces (11, 12). The substrate (2) is transferred in the passage (9) in a transfer direction (x'). The floor (10) of the passage (9) has a recess (13) for receiving a rail (14) and is provided along one side face (11) to guide to a moving direction (x'). The rail (14) is set to receive at least one substrate (2), and the apparatus (4) has a drive mechanism for moving the rail (14) in the transfer direction (x'). COPYRIGHT: (C)2004,JPO
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