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发明名称
METHOD OF PRODUCING A WATER-INSOLUBLE GERMANIUM OXIDE COATING AT THE SURFACE OF A GERMANIUM CRYSTAL
摘要
申请公布号
US3525650(A)
申请公布日期
1970.08.25
申请号
USD3525650
申请日期
1966.12.05
申请人
SIEMENS AG.
发明人
ERICH PAMMER;DIETER MALY
分类号
C23C22/02;C23C22/68;H01L21/316;(IPC1-7):C23F7/02
主分类号
C23C22/02
代理机构
代理人
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地址
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