| 摘要 |
PURPOSE: A light absorbing polymer for forming an organic anti-reflective coating, a composition including the same, and a method for forming a semiconductor device pattern using the same are provided to be capable of forming a vertical structure pattern and improving the uniformity of the vertical structure pattern. CONSTITUTION: A light absorbing polymer for forming an organic anti-reflective coating includes an acrylamide monomer as a light absorbing monomer. Preferably, the composition for forming the organic anti-reflective coating, contains the light absorbing polymer, a crosslink agent capable of forming a layer by using a crosslink reaction, a catalyst for promoting the crosslink reaction, and an organic solvent.
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