| 摘要 |
PROBLEM TO BE SOLVED: To provide a layered capacitor in which laminated layers are made flat and, which can largely reduce the size and increase the capacitance when the laminates are used for a capacitor. SOLUTION: In a method of manufacturing the layered capacitor, recessed sections produced by an electrical insulating section are flattened by etching a dielectric layer by performing a step of forming a dielectric, a step of treating the surface of the dielectric, a step of forming a pattern on a metallic electrode, a step of forming the metallic electrode, and a step of treating the surface of the metallic electrode in the same vacuum tank. COPYRIGHT: (C)2004,JPO |
