LITHOGRAPHIC SYSTEM, METHOD OF MANUFACTURING DEVICE, METHOD OF MEASURING PERFORMANCE, METHOD FOR CALIBRATION, AND COMPUTER PROGRAM

摘要

PROBLEM TO BE SOLVED: To provide a controller system for pulse radiation source that uses a lowest-order, preferably, first-order closed loop controller and performs dead beat control. SOLUTION: The performance index of a lithographic system with respect to a pulse radiation source is based on the moving average MA and moving standard deviation MSD of the error of actual pulse energy from target pulse energy. A normalized index is given by the equation (12) in which Epref(i) and Eperr(i) respectively denote the reference energy per pulse and energy error per pulse with respect to a point i and expressed by the formula (13). COPYRIGHT: (C)2004,JPO