发明名称 SEMICONDUCTOR DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a semiconductor device which assures a higher driving performance of transistor in the peripheral circuit region. <P>SOLUTION: The peripheral circuit region 63 comprises second semiconductor regions 9 formed on a semiconductor substrate 50, a second gate insulation film 12 which is formed thinner thin a first gate insulation film 13, a second gate electrode 15 formed on the second gate insulation film 12, and source and drain regions 31, doped with an impurity of the first conductivity type, formed in the second semiconductor regions 9 in both sides of the second gate electrode 15. The source and drain regions 31 include a p-type low concentration impurity region 29 contain relatively low impurity concentration of the first conductivity type and a p-type high concentration impurity region 30 containing relatively high p-type impurity concentration. <P>COPYRIGHT: (C)2004,JPO
申请公布号 JP2003332466(A) 申请公布日期 2003.11.21
申请号 JP20020143242 申请日期 2002.05.17
申请人 MITSUBISHI ELECTRIC CORP 发明人 KUBO SHUNJI
分类号 H01L21/8238;H01L21/8242;H01L27/092;H01L27/108 主分类号 H01L21/8238
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