| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing apparatus in which flexural strength of a polished object to be worked is guaranteed by providing a function for detecting a polishing state on a polished face of the polished object to be worked and judging a propriety of the polishing state. SOLUTION: In the polishing apparatus provided with a chuck table for holding the object to be worked and a polishing means for polishing the object to be worked held on the chuck table, the polishing apparatus is equipped with a polishing state detecting means for detecting the polished face of the object to be worked held on the chuck table and a control means for judging the propriety of the polishing state based upon a detecting signal from the polishing state detecting means. COPYRIGHT: (C)2004,JPO |
