| 摘要 |
PROBLEM TO BE SOLVED: To form such a soft magnetic ferrite material at a board temperature of 250°C or lower, which can be assembled in a single crystal shape in a resonance tunnel device by using the photolithography method. SOLUTION: A magnesium oxide board is kept at a temperature between 150°C and 250°C, and it is subjected to electron beam vapor deposition at a vacuum pressure of 10<SP>-2</SP>Pa or less while a spinel ferrite is used as a vapor deposition source, and then an oxygen defective spinel type soft magnetic ferrite single-crystal film with oxygen content of 48-54 atomic % is formed thereon, thereby manufacturing the soft magnetic ferrite material. COPYRIGHT: (C)2004,JPO
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