| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron microscope with which even an unskilled person can simply make an astigmatic correction and an axis alignment of electron beams. SOLUTION: After positioning on a light axis a visual field clearly displayable non-points or deviations in axis alignment by a ronchigram, a button of the ronchigram is clicked. When the ronchigram mode is selected, each lens and alignment coil are controlled in imaging conditions for the ronchigram. Further, either a TV camera 28 or 31 is selected and aligned on the light axis with an electron optics system maintained in a mode of a scanning transmission electron microscope. A ronchigram signal is obtained from the TV camera in this condition, and the signal is supplied to a computer 44 through a TV power source 40 and an interface 43 of a transmission electron microscope image. As a result, a ronchigram with a suitable size and brightness is displayed on an image-displaying area 50 of a display device 49, so that an operator makes an astigmatic correction and an adjustment of alignment while observing the ronchigram. COPYRIGHT: (C)2004,JPO
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