发明名称 PHOTO SPINNER EQUIPMENT HAVING CONSTANT TEMPERATURE WATER AUTOMATIC SUPPLY APPARATUS
摘要 PURPOSE: Photo spinner equipment having a constant temperature water automatic supply apparatus is provided to be capable of simplifying supply operation and simultaneously preventing the damage of a pumping motor due to the generation of overload. CONSTITUTION: Photo spinner equipment having a constant temperature water automatic supply apparatus is provided with a storing barrel(12) connected with a constant temperature water supply source(1) by using a supply line, a plurality of water level sensing sensors(13a,13b,13c) installed at the storing barrel for detecting the water level of constant temperature water, and a valve(14) for switching the path of the supply line according to the signal of the water level sensing sensor. The photo spinner equipment further includes a pumping motor(15) and a control part(17) for controlling the water level.
申请公布号 KR20030089295(A) 申请公布日期 2003.11.21
申请号 KR20020027454 申请日期 2002.05.17
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 SONG, GYEONG SU
分类号 H01L21/027;(IPC1-7):H01L21/027 主分类号 H01L21/027
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