| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of an EL element capable of sufficiently peeling off an undesired layer such as a photo resist layer. <P>SOLUTION: The manufacturing method of the EL element comprises an organic EL layer forming process of forming an organic EL layer on a substrate having at least an electrode layer formed thereon a peeling layer forming process for forming a peeling layer on the organic EL layer, a photo resist layer forming process for forming a photo resist layer thereon, a photo resist layer patterning process of patterning by exposing and developing the photo resist layer, an organic EL layer developing process of removing the organic EL layer in a part not covered with the photo resist layer, a peeling layer peeling process of removing the photo resist layer laminated on the peeling layer by peeling the peeling layer. <P>COPYRIGHT: (C)2004,JPO |
