| 摘要 |
PROBLEM TO BE SOLVED: To provide a power supply suitable for a flash lamp which is a heating source of an optical heating device for rapidly heating a semiconductor wafer. SOLUTION: The power supply stores energy in a main capacitor 14 and intermittently supplies the energy to the flash lamp 16 to emit light. Switching elements 10, 11 and a resonance tank 36 comprising a resonance inductance 35 and resonance capacitors 31, 32, are connected to a primary coil 61 of a transformer 6, and the main capacitor 14 and flash lamp 16 are connected to a secondary coil 62 of the transformer 6 through a voltage doubler rectifier circuit 13. COPYRIGHT: (C)2004,JPO |
