| 摘要 |
PROBLEM TO BE SOLVED: To provide a standard light source of a practical use as one for stabilization of wavelengths of a fluorine laser device, in case the fluorine laser device is used as a light source for a projection aligner such as a stepper or a scanning aligner. SOLUTION: The discharge lamp for a fluorine laser is provided with an emission spectrum near a wavelength of a laser light emitted from the fluorine laser device and stabilizes an oscillation wavelength of the laser light from the fluorine laser device with the use of the emission spectrum. The standard light source is provided with a window member (3) for emitting vacuum ultraviolet rays from onto an end part of a nearly cylindrical discharge vessel (1) and has either bromine molecules or a bromine compound as a luminous matter, and rare gas as a starting buffer gas. A pair of electrodes 4 (4a, 4b) of nearly a ribbon shape are arranged in a length direction of the discharge vessel (1) separated from each other an outside face of the discharge vessel (1) so as to surround the side face, with a length of the electrode 4b nearer to the window member shorter than that of the other electrode 4a. COPYRIGHT: (C)2004,JPO
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