| 摘要 |
PURPOSE: A yoke structure is provided to allow for a stable formation of magnetic field and achieve improved efficiency of generation of high frequency energy. CONSTITUTION: An anode cylinder and a vane are arranged in a yoke(101), and a filament is arranged at the center where the vane is mounted. An upper magnet and a lower magnet(22) are arranged at the upper and lower portions of the anode cylinder, respectively. The yoke has an input unit arranged at the lower portion of the yoke so as to input a power, and an output unit arranged at the upper portion of the yoke so as to output a high frequency energy. The yoke has a shape same as the shape of the upper and lower magnets so as to form a magnetic field in a stable manner.
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