发明名称 PIEZOELECTRIC VIBRATOR, AND ITS PRODUCTION METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a highly reliable piezoelectric vibrator with little change in frequency due to a fall impact, etc. <P>SOLUTION: The metallic film 1 for adjusting the frequency except the peripheral part is trimmed with a laser beam, so that the frequency is adjusted. The piezoelectric vibrator includes a metallic film 1 for adjusting the frequency on the front surface of a vibration piece 2, and the outer periphery of the metallic film 1 is arranged apart from the outer peripheral part of the main surface of the vibration piece. <P>COPYRIGHT: (C)2004,JPO
申请公布号 JP2003332872(A) 申请公布日期 2003.11.21
申请号 JP20020138508 申请日期 2002.05.14
申请人 SEIKO INSTRUMENTS INC 发明人 SHIMIZU TOSHIYUKI;OUCHI KEIICHI
分类号 H01L41/09;H01L41/18;H01L41/22;H01L41/253;H03H3/04;H03H9/02;H03H9/19 主分类号 H01L41/09
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