HIGH ANGLE STRENGTH SCHOTTKY ELECTRON POINT SOURCE

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of an electron source that has a chip shape fabricated precisely and an appropriate work function. SOLUTION: An electron emitter is manufactured by using a material that reduces the work function without requiring a long term heating step. By deleting the long term heating step, an emitter chip which has a small radius and a sharp taper can hold its shape, and a high angle strength is generated with an appropriate output level and stability. COPYRIGHT: (C)2004,JPO