JIG APPARATUS FOR FIXING WAFER

摘要

PURPOSE: A jig apparatus for fixing a wafer is provided to be capable of preventing a needle polish wafer from being broken in a cleaning process. CONSTITUTION: A jig apparatus comprises a case(120), a wafer table(140), a cleaner storage tank(180), a cleaner inlet hole(124), and a guide(160). The case(120) is provided with a slope plane(127). The wafer table(140) is mounted on the slope plane(127) of the case and further includes a wafer insertion groove(142). The cleaner storage tank(180) is located in the case. The guide(160) is located at the lower portion of the slope plane(127).