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发明名称
VORRICHTUNG ZUM BESTRAHLEN EINES SUBSTRATS MITTELS UV-STRAHLEN UND VERFAHREN ZUM BETRIEB DER VORRICHTUNG
摘要
申请公布号
DE59805621(D1)
申请公布日期
2003.11.20
申请号
DE19985005621
申请日期
1998.05.07
申请人
GLAUS, BERNHARD MAX
发明人
GLAUS, BERNHARD MAX
分类号
F26B3/28;(IPC1-7):F26B3/28
主分类号
F26B3/28
代理机构
代理人
主权项
地址
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