发明名称 SURFACE-SMOOTHING CONDUCTIVE LAYER FOR SEMICONDUCTOR DEVICES WITH MAGNETIC MATERIAL LAYERS
摘要 A semiconductor device (118) and method of fabrication thereof, wherein a plurality of conductive lines (124) are formed over a workpiece, a surface-smoothing conductive material (140) is disposed over the conductive lines (124), and a magnetic material (132) disposed is over the surface-smoothing conductive material (140). The surface-smoothing conductive material (140) has a smaller grain structure than the underlying conductive lines (124). The surface-smoothing conductive material (140) is polished so that the surface-smoothing conductive material (140) has a texturally smoother surface than the surface of the conductive lines (124).
申请公布号 WO03096354(A1) 申请公布日期 2003.11.20
申请号 WO2003EP04795 申请日期 2003.05.07
申请人 INFINEON TECHNOLOGIES AG 发明人 SENG, LOW, KIA
分类号 G11C11/14;G11C11/15;G11C11/16;H01F41/30;H01F41/34;(IPC1-7):G11C11/16;H01F10/30;H01F10/32 主分类号 G11C11/14
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