发明名称 SEMICONDUCTOR PROBE WITH RESISTIVE TIP AND METHOD OF FABRICATING THE SAME, AND INFORMATION RECORDING APPARATUS, INFORMATION REPRODUCING APPARATUS, AND INFORMATION MEASURING APPARATUS HAVING THE SEMICONDUCTOR PROBE
摘要 Provided are a semiconductor probe having a resistive tip, a method of fabricating the semiconductor probe, and a method of recording and reproducing information using the semiconductor probe. The semiconductor probe includes a tip and a cantilever. The tip is doped with first impurities. The cantilever has an end portion on which the tip is positioned. The tip includes a resistive area, and first and second semiconductor electrode areas. The resistive area is positioned at the peak of the tip and lightly doped with second impurities that are different from the first impurities. The first and second semiconductor electrode areas are heavily doped with the second impurities and contact the resistive area.
申请公布号 WO03096409(A1) 申请公布日期 2003.11.20
申请号 WO2003KR00878 申请日期 2003.05.01
申请人 SAMSUNG ELECTRONICS CO., LTD.;PARK, HONG-SIK;SHIN, HYUN-JUNG;JUNG, JU-HWAN 发明人 PARK, HONG-SIK;SHIN, HYUN-JUNG;JUNG, JU-HWAN
分类号 G11B9/14;G01Q60/48;G01Q70/16;G11B9/00;G11B9/02;G11B11/08;H01L21/66 主分类号 G11B9/14
代理机构 代理人
主权项
地址