发明名称 |
AN OPTICAL SYSTEM OPERATING WITH VARIABLE ANGLE OF INCIDENCE |
摘要 |
An optical system for use in measurements in a sample comprising a light source (102) operable to produce an incident light beam propagating in a certain direction towards the sample (S) through an illumination channel (IC), a detector unit (104) for collecting light coming from the sample through a detection channel (DC), and generating data indicative of the collected light, a light directing assembly (106) operable to direct the incident beam onto a certain location on the sample's plane with a plurality of incident angles, and to direct light returned from the illuminated location to the detector unit (104), the light directing assembly (106) comprising a plurality of beam deflector elements (108 A-D), at least one of the deflector elements being movable and position of said at least one movable deflector element defining one of the selected incident angles.
|
申请公布号 |
WO03095993(A1) |
申请公布日期 |
2003.11.20 |
申请号 |
WO2003IL00373 |
申请日期 |
2003.05.08 |
申请人 |
NOVA MEASURING INSTRUMENTS LTD.;BRILL, BOAZ;FINAROV, MOSHE;SCHEINER, DAVID |
发明人 |
BRILL, BOAZ;FINAROV, MOSHE;SCHEINER, DAVID |
分类号 |
G01N21/55;(IPC1-7):G01N21/55 |
主分类号 |
G01N21/55 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|