发明名称 |
FLUORINATED POLYMERS |
摘要 |
Provided are polymers derived from bridged heterocyclic compounds, fluorinated norbornene compounds, fluorinated alkenes, heterocyclic compounds, and combinations of two or more thereof for use in a wide variety of applications, including photoresist compositions. Also provided are methods for producing the monomer compounds for use in the present polymers.
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申请公布号 |
WO03095505(A1) |
申请公布日期 |
2003.11.20 |
申请号 |
WO2003US14298 |
申请日期 |
2003.05.07 |
申请人 |
HONEYWELL INTERNATIONAL INC. |
发明人 |
NAIR, HARIDASAN, K.;VAN DER PUY, MICHAEL;POSS, ANDREW, J.;NALENWAJEK, DAVID |
分类号 |
C07C17/16;C07C17/30;C07C22/02;C07C33/44;C07C67/343;C07C67/347;C07D487/08;C07D493/08;C08F8/18;G03F7/004;G03F7/039;(IPC1-7):C08F8/18;C07C2/50 |
主分类号 |
C07C17/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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