BESCHLEUNIGUNGS- UND ANALYSEVORRICHTUNG FÜR EINE IONENIMPLANTATIONSANLAGE,申请号DE19996006515T-传众专利搜索

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发明名称	BESCHLEUNIGUNGS- UND ANALYSEVORRICHTUNG FÜR EINE IONENIMPLANTATIONSANLAGE
摘要
申请公布号	DE69906515(T2)	申请公布日期	2003.11.20
申请号	DE19996006515T	申请日期	1999.05.25
申请人	VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES INC., GLOUCESTER	发明人	RENAU, ANTHONY;MCKENNA, CHARLES
分类号	H01J37/05;H01J37/317;(IPC1-7):H01J37/317;H01J37/305	主分类号	H01J37/05
代理机构		代理人
主权项
地址

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