| 发明名称 |
ULTRA SMALL THIN WINDOWS IN FLOATING GATE TRANSISTORS DEFINED BY LOST NITRIDE SPACERS |
| 摘要 |
A tiny oxide window, the upper layers (55, 57) are etched leaving the poly-t wo layer (57) over the laywe (41). The optional nitride spacers (51, 53) remain as protective barriers for the poly-one layer and its underlying oxyde layer . Source and implants (22, 24) may be made using the ONO layer as a self- alignment tool.
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| 申请公布号 |
CA2484739(A1) |
申请公布日期 |
2003.11.20 |
| 申请号 |
CA20032484739 |
申请日期 |
2003.04.04 |
| 申请人 |
ATMEL CORPORATION |
发明人 |
RENNINGER, ALAN L.;DAEMEN, ELEONORE;LOJEK, BOHUMIL |
| 分类号 |
H01L21/28;H01L21/336;H01L21/8247;H01L27/115;H01L29/423;H01L29/788;H01L29/792;(IPC1-7):H01L21/336 |
主分类号 |
H01L21/28 |
| 代理机构 |
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