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发明名称
SELECTIVE METAL OXIDE REMOVAL
摘要
申请公布号
WO03012850(B1)
申请公布日期
2003.11.20
申请号
WO2002US18475
申请日期
2002.06.11
申请人
MOTOROLA, INC.
发明人
HOBBS, CHRISTOPHER, C.;TOBIN, PHILIP, J.
分类号
H01L21/302;H01L21/265;H01L21/28;H01L21/311;H01L21/336;H01L29/10;H01L29/51;H01L29/78;H01L29/786;(IPC1-7):H01L21/311
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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