Accurate multi-ground inductor for optical communication circuits

摘要

A structure and method for implementing a precision inductive component within a high frequency integrated circuit is disclosed. The inductive component has a structure of multiple conductive layers dielectrically insulated from each other and located above an integrated circuit substrate. The inductive component comprises a spiral-like inductive layer made of a first conductive layer. Additionally, a number of additional ground planes, each patterned out of its own selected conductive layer to minimize an induced eddy current therein thus improving Q (quality factor) under high frequency operation, are employed with either a linear or a rotational offset amongst them to effect a corresponding amount of adjustment of an inductance value of the inductive component. A number of specific design cases are presented with their respective inductance and RF performance parameters.