发明名称 METHOD OF FORMING MANOFLUIDIC CHANNELS
摘要 <p>A method of forming nanofluidic enclosed channels includes providing a first substrate having a layer of a first material disposed thereon. A plurality of nanoscale slots is formed along a second substrate using nanolithography, etching, or other disclosed techniques. The first substrate is then bonded to the second substrate such that the layer of the first material on the first substrate is adjacent the plurality of slots on the second substrate to define a plurality of enclosed nanofluidic channels therethrough.</p>
申请公布号 WO2003095358(P1) 申请公布日期 2003.11.20
申请号 US2003014962 申请日期 2003.05.13
申请人 发明人
分类号 主分类号
代理机构 代理人
主权项
地址