SYSTEM UND VERFAHREN ZUR KOMPENSATION DER EIGENSCHAFT EINER DÜSENPLATTE EINES TINTENSTRAHLDRUCKERS

摘要

A system and method of adjusting mask feature dimensions to compensate for anomalies in energy output of a laser beam used in ablating a workpiece. This method involves measuring the effects of variations in energy output of the laser beam at several points in the laser beam profile. In the case where the workpiece is a nozzle plate, the features adjusted in the mask are the diameters of the mask holes. Differences in the effects of the energy output between the points in the laser beam are then compensated for by adjusting the mask features that correspond to the points in the laser beam.