| 摘要 |
<p>A beam directing method and device are presented for spatially separating between a primary charged particle beam BR and a beam of secondary particles BS returned from a sample 2 as a result of its interaction with the primary charged particle beam. The primary charged particle beam is directed towards the beam directing device along a first axis OA’ passing an opening 9A in a detector 9, which has charged particle detecting regions 9B outside this opening. The trajectory of the primary charged particle beam is then affected to cause the primary charged particle beam propagation to the sample along a second axis OA” substantially parallel to and spaced-apart from the first axis. This causes the secondary charged particle beam propagation to the detecting region outside the opening in the detector.</p> |
