METHOD FOR HIGH PURITY PURIFICATION OF HIGH FUNCTIONAL MATERIAL AND METHOD FOR DEPOSITION OF HIGH FUNCTIONAL MATERIAL BY MASS SEPARATION METHOD

摘要

A method for high purity purification, wherein an organic compound, such as dimethyl zinc, or a gaseous element compound, such as oxygen as a starting material is irradiated with an excimer laser (21), dissociated and ionized by the non-resonant multiphoton absorption not passing by way of an intermediate level, and the ionized element is freed of impurities by the mass separation method using the electromagnetic field (55) to thereby deposit a predetermined ionized element alone on a target (61). In an embodiment, elements to be ionized are Zn and, Se or O, and N, Cl or the like is used as a dopant. The method allows the reduction of the load by impurities derived from starting materials and the improvement of ionization efficiency, resulting in the improvement of productivity, in a high purity purification process by the mass separation method for an element such as zinc or selenium.