APPARATUS FOR CONTROLLING SEMICONDUCTOR CHIP MANUFACTURING PROCESS AND APPARATUS HAVING THE SAME

摘要

PURPOSE: An apparatus for controlling a semiconductor chip manufacturing process and apparatus having the same are provided to be capable of previously preventing process error for improving the quality and productivity of the semiconductor chip by detecting the location of the semiconductor chip using a sensing part. CONSTITUTION: An apparatus for controlling a semiconductor chip manufacturing process is provided with a pair of sensing parts(102,104) for detecting the peripheral portion of a semiconductor substrate, and a processor(110) connected with the sensing parts. Preferably, the sensing part includes a light source for supplying light to the peripheral portion of the semiconductor substrate and a light detecting part for detecting the light reflected from the peripheral portion of the semiconductor substrate.