Abtastbelichtungsapparat und Verfahren zur Herstellung einer Vorrichtung unter Verwendung desselben,申请号DE19976019273T-传众专利搜索

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发明名称	Abtastbelichtungsapparat und Verfahren zur Herstellung einer Vorrichtung unter Verwendung desselben
摘要
申请公布号	DE69719273(T2)	申请公布日期	2003.11.20
申请号	DE19976019273T	申请日期	1997.09.24
申请人	CANON K.K., TOKIO/TOKYO	发明人	EBINUMA, RYUICHI
分类号	G03F7/20;H01L21/027;(IPC1-7):G03F7/20	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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