发明名称 Under bump metallurgy structural design for high reliability bumped packages
摘要 A method for creating an under bump metallization layer (37) is provided. In accordance with the method, a die (33) is provided which has a die pad (35) disposed thereon. A photo-definable polymer (51 or 71) is deposited on the die pad, and an aperture (66) is created in the photo-definable polymer. Finally, an under bump metallization layer (37) is deposited in the aperture. A die package is also provided comprising a die having a die pad (35) disposed thereon, and having an under bump metallization layer (37) disposed on the die pad. The structure has a depression or receptacle (57) therein and has a thickness of at least about 20 microns.
申请公布号 US2003214036(A1) 申请公布日期 2003.11.20
申请号 US20020145500 申请日期 2002.05.14
申请人 MOTOROLA INC. 发明人 SARIHAN VIJAY;FAY OWEN;KESER LIZABETH ANN
分类号 H01L21/288;H01L21/60;H01L23/485;(IPC1-7):H01L23/48 主分类号 H01L21/288
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