发明名称 FLUORINATED POLYMERS
摘要 <p>Provided are polymers derived from bridged heterocyclic compounds, fluorinated norbornene compounds, fluorinated alkenes, heterocyclic compounds, and combinations of two or more thereof for use in a wide variety of applications, including photoresist compositions. Also provided are methods for producing the monomer compounds for use in the present polymers.</p>
申请公布号 WO2003095505(P1) 申请公布日期 2003.11.20
申请号 US2003014298 申请日期 2003.05.07
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