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发明名称
Verfahren zur Herstellung eines feinen hydrophoben Siliziumdioxidpulvers
摘要
申请公布号
DE60100978(D1)
申请公布日期
2003.11.20
申请号
DE20016000978
申请日期
2001.08.31
申请人
SHIN-ETSU CHEMICAL CO., LTD.
发明人
NOZAWA, YASUAKI;SHIRASUNA, KIYOSHI;UEHARA, HIDEKAZU;SHIBATA, KEIJI;UENO, SUSUMU
分类号
G01N21/956;C09C1/30;C30B29/06;G01N21/95;H01L21/02;H01L21/304;H01L21/66;(IPC1-7):C09C1/30
主分类号
G01N21/956
代理机构
代理人
主权项
地址
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