发明名称 |
Method for forming bottle trenches |
摘要 |
A method for forming bottle trenches. The method comprises providing a substrate formed with a pad stack layer on the top, and a deep trench with protective layer on the upper portions of sidewalls thereof, implanting ions into the lower portions of sidewalls and bottom of the trench not covered by the protective layer to amorphize the atomic structure of the sidewalls and bottom, oxidizing the amorphous sidewalls and bottom of the trench to form a bottle-shaped oxide layer thereon, and removing the bottle-shaped oxide layer.
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申请公布号 |
US2003216044(A1) |
申请公布日期 |
2003.11.20 |
申请号 |
US20030430874 |
申请日期 |
2003.05.07 |
申请人 |
NANYA TECHNOLOGY CORPORATION |
发明人 |
LIN SHIAN-JYH;LAI CHAO-SUNG |
分类号 |
H01L21/302;H01L21/3065;H01L21/334;H01L21/461;H01L21/76;H01L21/762;H01L21/8242;(IPC1-7):H01L21/824 |
主分类号 |
H01L21/302 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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