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发明名称
System zum Reinigen von Halbleiterscheiben mit megasonischer Wanderwelle
摘要
申请公布号
DE69905538(T2)
申请公布日期
2003.11.20
申请号
DE1999605538T
申请日期
1999.10.04
申请人
KABUSHIKI KAISHA TOSHIBA, KAWASAKI;INTERNATIONAL BUSINESS MACHINES CORP., ARMONK
发明人
AKATSU, HIROYUKI;NADAHARA, SOICHI
分类号
B08B3/12;H01L21/00;H01L21/304;(IPC1-7):B08B3/12
主分类号
B08B3/12
代理机构
代理人
主权项
地址
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