METHOD OF FABRICATING THREE-DIMENSIONAL COMPONENTS USING ENDPOINT DETECTION

摘要

One embodiment of the present invention provides a system for using selective etching to form three-dimensional components on a substrate. The system operates by receiving a substrate composed of a first material (102). Next, a second layer composed of a second material (104) is formed on selected portions of the substrate. A third layer composed of a third material (304) is then formed over the substrate and the second layer. Finally, an etching operation using a selective etchant is used to remove the second layer, thereby leaving the substrate, which forms a first active layer (116), and leaving the third layer, which forms a second active layer (114).