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发明名称
Vorrichtung für die plasmagestützte Gasphasenabscheidung
摘要
申请公布号
DE69906180(T2)
申请公布日期
2003.11.20
申请号
DE19996006180T
申请日期
1999.01.16
申请人
MITSUBISHI HEAVY INDUSTRIES, LTD.
发明人
MURATA, MASAYOSHI;TAKEUCHI, YOSHIAKI;MASHIMA, HIROSHI;TAKANO, AKEMI;YOSHIDA, HIROHISA
分类号
C23C16/50;H01J37/32;H01L21/205;H01L31/04;(IPC1-7):H01J37/32
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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