发明名称 Method and apparatus for displaying test results and recording medium
摘要 There are provided a method and an apparatus for displaying test results and a recording medium, which allow easy detection of DUT's in which probes are destroyed. The apparatus has two wafer probers, a work station, and a PC. On the basis of a display program and a display mode switching program stored in a ROM of the work station, respective test results of testing semiconductor chips by the two wafer probers are displayed on a CRT of the PC in correspondence to positions of the semiconductor chips on a wafer substrate, and, at the same time, a pass/fail ratio for each of the DUT's is displayed in parallel with the test results of the semiconductor chips.
申请公布号 US2003217317(A1) 申请公布日期 2003.11.20
申请号 US20030458637 申请日期 2003.06.11
申请人 OKI ELECTRIC INDUSTRY CO., LTD. 发明人 KATO TOSHIAKI
分类号 H01L21/66;G01R31/317;G01R31/319;G11C29/00;G11C29/56;(IPC1-7):G06F11/00;G01R31/28 主分类号 H01L21/66
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